Technical Parameters
Parameter name | Value and range |
---|---|
Test wavelength | 266–1650 nm (6 selectable wavelengths) |
Refractive index accuracy | ±0.0005 |
Refractive index resolution | ±0.0003 |
Refractive index measurement range | 1.0-1.8 |
1.8-2.4 | |
2.4-3.35 (optional prism) | |
Thickness accuracy | ± (0.5% + 50 Å) |
Thickness resolution | ± 0.3% |
Film thickness measurement range | 0.4 - 150 µm |
Waveguide loss measurement range | 0.05-50dB/cm |
Waveguide loss accuracy | ± 5% (i.e. 1dB/cm, measurement error ±0.05 dB/cm) |
Sample size | Minimum 3 mm*3 mm |
Maximum 50 mm*50 mm | |
Base thickness: < 1 mm | |
Sample Rotating Stage | -90° ~ 90° |
Optional variable temperature system | Temperature range: room temperature - 200°C |